A Study of ZnO Buffer Layer Effect on Physical Properties of ITO Thin Films Deposited on Different Substrates

Document Type: Research Article

Authors

1 Faculty of Electrical Engineering, K.N. Toosi University of Technology, Tehran, I.R. IRAN

2 Faculty of Mechanical Engineering, K.N. Toosi University of Technology, Tehran, I.R. IRAN

3 Thin Film Laboratory, ECE Department, University of Tehran, Tehran, I.R. IRAN

Abstract

The improvement of the physical properties of Indium Tin Oxide (ITO) layers is quite advantageous in photovoltaic applications. In this study the ITO film is deposited by RF sputtering onto p-type crystalline silicon (c-Si) with (100) orientation, multicrystalline silicon (mc-Si), and glass substrates coated with ZnO and annealed in vacuum furnace at 400°C. Electrical, optical, structural and morphological properties of the ITO films were analyzed by four point probe, UV/VIS/IR spectrophotometer, X-Ray Diffraction (XRD) and Scanning Electron Microscope (SEM). The quality of films deposited on buffer layer is found to be superior to those grown directly on a substrate. The structural, optical and electrical studies reveal that ZnO buffer layers improve the crystalline quality, optical and electrical properties of ITO thin films.  

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Main Subjects


[1] Manavizadeh N. et al., Influence of Substrates on the Structural and Morphological Properties of RF Sputtered ITO thin Films for Photovoltaic Application, Thin Solid Films, 517, p. 2324 (2009).
[2] Krebs F., Spanggard H., Kjaer T., Biancardo MMM., Alstrup J., Large Area Plastic Solar Cell Modules, Material Science Engineering: B, 138, p. 106 (2007).
[3] Betz U., Kharrazi Olsson M., Marthy J., Escolá M.F., Atamny F., Thin Films Engineering of Indium Tin Oxide: Large Area Flat Panel Displays Application, Surface and Coatings Technology, 200, p. 5751 (2006).
[4] Boiadjiev S.I., Dobrikov G.H., Rassovska M.M.M., Preparation and Properties of RF Sputtered Indium-Tin Oxide Thin Films for Applications as Heat Mirrors in Photothermal Solar Energy Conversion, Thin Solid Films, 515, p. 8465 (2007).
[5] Hung K.-Y., Pei C.-C., Hu C.-J., Yang T.-C., Manipulation Image Processing Algorithmic Technology to Realize 1.8, RGBW Transflective TFT-LCDs with Adjustable Colour Gamut, Displays, 29, p. 526 (2008).
[6] Adurodija F.O., Izumi H., Ishihara T., Yoshioka H., Motoyama M., Effect of Sn Doping on the Electronic Transport Mechanism of Indium-Tin-Oxide Films Grown by Pulsed Laser Deposition Coupled with Substrate Irradiation, Journal of Applied Physics 88, p. 4175 (2000).
[7] Yang C., Lee S., Lin T., Chen S., Electrical and Optical Properties of Indium Tin Oxide Films Prepared on Plastic Substrates by Radio Frequency Magnetron Sputtering, Thin Solid Films, 516, p. 1984 (2008).
[8] Sato Y., Taketomo M., Ito N., Miyamura A., Shigesato Y., Comparative Study on Early Stages of Film Growth for Transparent Conductive Oxide Films Deposited by dc Magnetron Sputtering, Thin Solid Films, 516, p. 4598 (2008).
[9] Fallah H.R., Ghasemi M., Hassanzadeh A., Steki H., The Effect of Annealing on Structural, Electrical and Optical Properties of Nanostructured ITO Films Prepared by e-beam Evaporation, Materials Research Bulletin, 42, p. 487 (2007).
[10] Viespe C., Nicolae I., Sima C., Grigoriu C., Medianu R., ITO Thin Films Deposited by Advanced Pulsed Laser Deposition, Thin Solid Films, 515, p. 8771 (2007).
[11] Rozati S.M., Ganj T., Transparent Conductive Sn-Doped Indium Oxide Thin Films Deposited by Spray Pyrolysis Technique, Renewable Energy, 29, p. 1671 (2004).
[12] Klingshirn C., The Luminescence of ZnO under High One - and Two-Quantum Excitation, Phys. Status Solidi B, 71, p. 547 (1975).
[13] Kassis A., Saad M., Fill Factor Losses in ZnO/CdS/CuGaSe2 Single-Crystal Solar Cells, Sol. Energy Mater. Sol. Cells, 80, p. 491 (2003).
[14] Ozgur U., Ya I., Alivov C., Liu A., Teke M.A., Reshchikov S., Dogan V., Avrutin S.J., Cho H., A Comprehensive Review of ZnO Materials and Devices, J. Appl. Phys., 98, 041301-103  (2005).
[15] Hong R., Shao J., He H., Fan Z., Enhancement of Near-Band-Edge Photoluminescence of ZnO Thin Films in Sandwich Configuration at Room Temperature, J. Appl. Phys., 99, 093520-093523 (2006).
[16] Herrero J., Guillen C., Improved ITO Thin Films for Photovoltaic Applications With a Thin ZnO Layer by Sputtering, Thin Solid Films, 451–452, p. 630 (2004).
[17] Manavizadeh N., Khodayari A., Asl-Soleimani E., Bagherzadeh S., Maleki M., Structural Properties of Post Annealed ITO Thin Films at Different Tempratures, Iran. J. Chem. Chem. Eng., 28(2), p. 57 (2009).
[18] Guillén C., Herrero J., Polycrystalline Growth and Recrystallization Processes in Sputtered ITO Thin Films, Thin Solid Films, 510, p. 260 (2006).
[19] Herrero J., Guillén C., Transparent Films on Polymers for Photovoltaic Applications, Vacuum, 67, 611 (2002).
[20] Meng L.-J., Crossan E., Voronov A., Placido F., Indium-Tin-Oxide Thin Film Prepared by Microwave-Enhanced d.c. Reactive Magnetron Sputtering for Telecommunication Wavelengths, Thin Solid Films, 422, p. 80 (2002).
[21] Gao M., Shi H.-G., Substrate Dependence of Properties of Sputtered ITO Films, Chin. Phys. Lett., 22(5), p. 1228 (2005).